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The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror

In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror gener...

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Principais autores: Minqiang Li, Lin Qin, Xiasheng Wang, Jiaojiao Wen, Tong Wu, Xiaoming Huang, Hongbo Yin, Yi Tian, Zhuqing Wang
Format: Artigo
Jezik:Inglês
Izdano: MDPI AG 2025-05-01
Serija:Micromachines
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Online dostop:https://www.mdpi.com/2072-666X/16/6/640
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