Charge trapping phenomenon in Al/SRO/Al on Si structure by lateral electrical stress
In this article, the observation of charge trapping effect of silicon rich oxide (SRO) layer in an Al/SRO/Al on Si structureby lateral electrical stress is reported. The density of trapped charges depends on the deposition and post-treatmentconditions of the SRO layer. For the Al/SRO/Al structure gr...
Gardado en:
| Publicado en: | Superficies y vacío |
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| Principais autores: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2003
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=94216406 |
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