Photoluminescence and cathodoluminescence characteristics of SiO2 and SRO films implanted with Si
Silicon rich oxide films (SRO)were obtained by silicon implantation in silicon dioxide and PE LPCVD techniques. Also, PECVD and LPCVD SRO films were implanted with silicon to get super enriched SRO. Photo- and Cathodo Luminescence (PL and CL) studies of these materials are presented. All the samp...
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| Publié dans: | Superficies y vacío |
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| Auteurs principaux: | , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2005
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| Sujets: | |
| Accès en ligne: | https://www.redalyc.org/articulo.oa?id=94218202 |
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