Charge trapping phenomenon in Al/SRO/Al on Si structure by lateral electrical stress
In this article, the observation of charge trapping effect of silicon rich oxide (SRO) layer in an Al/SRO/Al on Si structureby lateral electrical stress is reported. The density of trapped charges depends on the deposition and post-treatmentconditions of the SRO layer. For the Al/SRO/Al structure gr...
Na minha lista:
| 發表在: | Superficies y vacío |
|---|---|
| Principais autores: | , , , |
| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2003
|
| 主題: | |
| 在線閱讀: | https://www.redalyc.org/articulo.oa?id=94216406 |
| 標簽: |
沒有標簽, 成為第一個標記此記錄!
|