Structural, optical and mechanical properties of AlN films - effect of thickness
Highly stoichiometric hexagonal AlN films of different thicknesses ranging from »10 nm to >1 mm were synthetized onsilicon (100) substrates under the same deposition conditions by dc reactive magnetron sputtering. The X-ray diffractionand reflectometry, ellipsometry, scanning electron and atomic for...
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| Publicado no: | Superficies y vacío |
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| Principais autores: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2003
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=94216105 |
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