Hollow Cathode Magnetron Deposition of AlN thin Films: Crystalline Structure and Morphology
A new dc hollow cathode plasma source has been assembled whith a conventional planar magnetron cathodeused together with another plane cathode plate to form a hollow cathode cavity. The system comprises twocathode plates of aluminium separated by a distance d, one of them acting as target of the mag...
Gorde:
| Argitaratua izan da: | Brazilian Journal of Physics |
|---|---|
| Egile Nagusiak: | , , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Sociedade Brasileira de Física
2006
|
| Gaiak: | |
| Sarrera elektronikoa: | https://www.redalyc.org/articulo.oa?id=46436326 |
| Etiketak: |
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!
|