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Hollow Cathode Magnetron Deposition of AlN thin Films: Crystalline Structure and Morphology
A new dc hollow cathode plasma source has been assembled whith a conventional planar magnetron cathodeused together with another plane cathode plate to form a hollow cathode cavity. The system comprises twocathode plates of aluminium separated by a distance d, one of them acting as target of the mag...
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| Publicat a: | Brazilian Journal of Physics |
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| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Sociedade Brasileira de Física
2006
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| Matèries: | |
| Accés en línia: | https://www.redalyc.org/articulo.oa?id=46436326 |
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