Thin film deposition of nitrided amorphous carbon by laser ablation

Thin films of amorphous carbon (a-C) were grown by laser ablation in a nitrogen atmosphere at pressures from 4.5x10-4Torr to 7.5x10-2 Torr. The structural properties of the films were studied by Raman spectroscopy. The obtained spectrawere similar to those reported for Diamond-Like Carbon (DLC) film...

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Shranjeno v:
Bibliografske podrobnosti
izdano v:Superficies y vacío
Main Authors: M. A. Camacho Lopez, B. Rebollo, E. Camps, S. Muhl, L. Escobar, E. Haro Poniatowski
Format: Artigo
Jezik:Inglês
Izdano: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2000
Teme:
Física, Astronomía y Matemáticas
Thin films
Laser ablation
Carbon nitride
Raman Spectroscopy
Online dostop:https://www.redalyc.org/articulo.oa?id=94201106
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