Synthesis and characterization of a-CNx thin films prepared by laser ablation

Amorphous carbon nitride (a-CNx) thin films were synthesized by laser ablation on silicon (100) and glasssubstrates. The plasma was produced using the fundamental line of a Nd:YAG laser with 28 ns pulse durationfocused on a graphite target. Deposition of a-CN films was carried out in a nitrogen atmo...

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Salvato in:
Dettagli Bibliografici
Pubblicato in:Superficies y vacío
Autori principali: S. Muhl, E. Camps, A. Arrieta, L. Escobar
Natura: Artigo
Lingua:Inglês
Pubblicazione: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 2004
Soggetti:
Física, Astronomía y Matemáticas
CNx
Laser ablation
Carbon nitride
Optical band gap
Surface morphology
Accesso online:https://www.redalyc.org/articulo.oa?id=94217304
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