Synthesis and characterization of a-CNx thin films prepared by laser ablation
Amorphous carbon nitride (a-CNx) thin films were synthesized by laser ablation on silicon (100) and glasssubstrates. The plasma was produced using the fundamental line of a Nd:YAG laser with 28 ns pulse durationfocused on a graphite target. Deposition of a-CN films was carried out in a nitrogen atmo...
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| Publicat a: | Superficies y vacío |
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| Autors principals: | , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2004
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| Matèries: | |
| Accés en línia: | https://www.redalyc.org/articulo.oa?id=94217304 |
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