Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation

We have deposited, for the first time, CNx films by sub-picosecond excimer laser ablation (KrF, l = 248 nm, tL = 0.5 ps) of graphite at 9 J/cm2 laser fluence in different nitrogen pressures.In this paper we discuss the obtained film properties, as a result of several diagnostic techniques (scanning...

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Dades bibliogràfiques
Publicat a:Superficies y vacío
Autors principals: S. Acquaviva, A. Perrone, A. Zocco, A. Klini, C. Fotakis
Format: Artigo
Idioma:Inglês
Publicat: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Matèries:
Física, Astronomía y Matemáticas
Sub
Nitrides
Thin Films
Laser Ablation
picosecond Laser
Accés en línia:https://www.redalyc.org/articulo.oa?id=94200945
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