Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation
We have deposited, for the first time, CNx films by sub-picosecond excimer laser ablation (KrF, l = 248 nm, tL = 0.5 ps) of graphite at 9 J/cm2 laser fluence in different nitrogen pressures.In this paper we discuss the obtained film properties, as a result of several diagnostic techniques (scanning...
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| Wydane w: | Superficies y vacío |
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| Główni autorzy: | , , , , |
| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Hasła przedmiotowe: | |
| Dostęp online: | https://www.redalyc.org/articulo.oa?id=94200945 |
| Etykiety: |
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