Influence of nitrogen gas pressure on plume-plasma and chemical bonding of carbon nitride films synthesized by pulsed laser deposition
The effect of nitrogen gas pressure on the atomic structure of Carbon Nitride (CNx) thin films synthesized by pulsed laser deposition has been studied. CNx thin films were deposited from a graphite target in nitrogen atmosphere on silicon substrates at a temperature of 300 ◦C at laser fluences of 2...
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| Publicado no: | Revista Mexicana de Física |
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| Principais autores: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Física A.C.
2007
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=57036163066 |
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