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Influence of nitrogen gas pressure on plume-plasma and chemical bonding of carbon nitride films synthesized by pulsed laser deposition

The effect of nitrogen gas pressure on the atomic structure of Carbon Nitride (CNx) thin films synthesized by pulsed laser deposition has been studied. CNx thin films were deposited from a graphite target in nitrogen atmosphere on silicon substrates at a temperature of 300 ◦C at laser fluences of 2...

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發表在:Revista Mexicana de Física
Principais autores: H. Riascos, G. Zambrano, E. Camps, P. Prieto
格式: Artigo
語言:Inglês
出版: Sociedad Mexicana de Física A.C. 2007
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在線閱讀:https://www.redalyc.org/articulo.oa?id=57036163066
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