Thin film deposition of nitrided amorphous carbon by laser ablation
Thin films of amorphous carbon (a-C) were grown by laser ablation in a nitrogen atmosphere at pressures from 4.5x10-4Torr to 7.5x10-2 Torr. The structural properties of the films were studied by Raman spectroscopy. The obtained spectrawere similar to those reported for Diamond-Like Carbon (DLC) film...
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| Publicat a: | Superficies y vacío |
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| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2000
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| Matèries: | |
| Accés en línia: | https://www.redalyc.org/articulo.oa?id=94201106 |
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