Bias enhanced nucleation process of polycrystalline diamond films

We have studied the bias-enhanced nucleation process in the deposition of diamond films by Microwave Plasma Assisted Chemical Vapor Deposition Process (MWCVD). We have found a clear dependence between the nucleation time and the surface morphology of the polycrystalline diamond films whereas the che...

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Shranjeno v:
Bibliografske podrobnosti
izdano v:Superficies y vacío
Main Authors: J. M. Albella, M.M. García, O. Sánchez, C. Gómez Aleixandre
Format: Artigo
Jezik:Inglês
Izdano: Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C. 1999
Teme:
Física, Astronomía y Matemáticas
AFM
roughness
BEN process
diamond films
Online dostop:https://www.redalyc.org/articulo.oa?id=94200930
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