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Bias enhanced nucleation process of polycrystalline diamond films
We have studied the bias-enhanced nucleation process in the deposition of diamond films by Microwave Plasma Assisted Chemical Vapor Deposition Process (MWCVD). We have found a clear dependence between the nucleation time and the surface morphology of the polycrystalline diamond films whereas the che...
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| Publicado no: | Superficies y vacío |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Assuntos: | |
| Acesso em linha: | https://www.redalyc.org/articulo.oa?id=94200930 |
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