Mechanical properties of boron nitride thin films obtained by rf-pecvd at low temperatures
This work describes the thermomechanical and structural modifications in RF-PECVD boron nitride thin films induced by the deposition conditions. The samples were prepared at low temperatures (below 400 oC) using B2H6, N2 and H2 gaseous mixtures. The B2H6/N2 flow ratios, the B2H6 flow, the N2 flow, t...
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| Publié dans: | Superficies y vacío |
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| Auteurs principaux: | , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
1999
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| Sujets: | |
| Accès en ligne: | https://www.redalyc.org/articulo.oa?id=94200927 |
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