Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
Tix Al1−x N coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscopy, x-ray diffraction and atomic force micro...
Salvato in:
| Pubblicato in: | Ingeniería y Ciencia |
|---|---|
| Autori principali: | , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Universidad EAFIT
2014
|
| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=83531311004 |
| Tags: |
Nessun Tag, puoi essere il primo ad aggiungerne!!
|