Structure of TiAlN Reactive Sputtered Coatings

The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-freq...

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Bibliografiska uppgifter

Huvudupphov:	D. Philippon, V. Godinho, V.D.  Blank, A.S. Useinov, K.V. Gogolinsky, A.N. Kirichenko, S.N. Polyakov, B.N. Mavrin, E.A. Vinogradov, V.N. Denisov, A. Fernandez
Materialtyp:	Artigo
Språk:	Inglês
Utgiven:	Sumy State University 2012-03-01
Serie:	Журнал нано- та електронної фізики
Ämnen:	Coating Hardness Reactive Sputtering TiAlN X-Ray Diffraction Raman Spectroscop
Länkar:	http://jnep.sumdu.edu.ua/download/numbers/2012/1/articles/jnep_2012_V4_01021.pdf
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