Structure of TiAlN Reactive Sputtered Coatings
The Raman spectra, X-ray diffraction and hardness of the TiAlN films co-deposited on the steel substrates by reactive sputtering from Ti and Al targets in a mixture of N2 + Ar gas with two magnetrons at room temperature have been studied. From Raman spectra it is found that the position of high-freq...
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| Autori principali: | , , , , , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sumy State University
2012-03-01
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| Serie: | Журнал нано- та електронної фізики |
| Soggetti: | |
| Accesso online: | http://jnep.sumdu.edu.ua/download/numbers/2012/1/articles/jnep_2012_V4_01021.pdf |
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