Structural and Morphological Properties of Titanium Aluminum Nitride Coatings Produced by Triode Magnetron Sputtering
Tix Al1−x N coatings were grown using the triode magnetron sputtering technique varying the bias voltage between -40 V and -150V. The influence of bias voltage on structural and morphological properties was analyzed by means of energy dispersive spectroscopy, x-ray diffraction and atomic force micro...
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| Publicado en: | Ingeniería y Ciencia |
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| Principais autores: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
Universidad EAFIT
2014
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| Assuntos: | |
| Acceso en liña: | https://www.redalyc.org/articulo.oa?id=83531311004 |
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