Optical sensing technique for Youngs modulus measurements in piezoelectric materials
In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices....
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| Udgivet i: | Revista Mexicana de Física |
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| Principais autores: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
Sociedad Mexicana de Física A.C.
2008
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| Fag: | |
| Online adgang: | https://www.redalyc.org/articulo.oa?id=57054312 |
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