Optical sensing technique for Youngs modulus measurements in piezoelectric materials
In the design of microsensors using microelectromechanical system (MEMS) technology, it is necessary to know the elastic properties ofthe materials employed in their fabrication. Reliable mechanical properties of the materials are critical to the safety and correct functioningof these microdevices....
Gorde:
| Argitaratua izan da: | Revista Mexicana de Física |
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| Egile Nagusiak: | , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Sociedad Mexicana de Física A.C.
2008
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| Gaiak: | |
| Sarrera elektronikoa: | https://www.redalyc.org/articulo.oa?id=57054312 |
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