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Thermal Conductivity of Nano-Crystallized Indium-Gallium-Zinc Oxide Thin Films Determined by Differential Three-Omega Method

The temperature dependence thermal conductivity of the indium-gallium-zinc oxide (IGZO) thin films was investigated with the differential three-omega method for the clear demonstration of nanocrystallinity. The thin films were deposited on an alumina (α-Al(2)O(3)) substrate by direct current (DC) ma...

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Detalhes bibliográficos
Publicado no:Nanomaterials (Basel)
Main Authors: Khan, Rauf, Ohtaki, Michitaka, Hata, Satoshi, Miyazaki, Koji, Hattori, Reiji
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2021
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8230821/
https://ncbi.nlm.nih.gov/pubmed/34208185
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano11061547
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