Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

[Image: see text] We present an experimental and theoretical analysis of the formation of nanovoids within Si microcrystals epitaxially grown on Si patterned substrates. The growth conditions leading to the nucleation of nanovoids have been highlighted, and the roles played by the deposition rate, s...

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Xehetasun bibliografikoak
Argitaratua izan da:Cryst Growth Des
Egile Nagusiak: Barzaghi, Andrea, Firoozabadi, Saleh, Salvalaglio, Marco, Bergamaschini, Roberto, Ballabio, Andrea, Beyer, Andreas, Albani, Marco, Valente, Joao, Voigt, Axel, Paul, Douglas J., Miglio, Leo, Montalenti, Francesco, Volz, Kerstin, Isella, Giovanni
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: American Chemical Society 2020
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC8016367/
https://ncbi.nlm.nih.gov/pubmed/33828439
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.cgd.9b01312
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