Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

[Image: see text] We present an experimental and theoretical analysis of the formation of nanovoids within Si microcrystals epitaxially grown on Si patterned substrates. The growth conditions leading to the nucleation of nanovoids have been highlighted, and the roles played by the deposition rate, s...

Πλήρης περιγραφή

Αποθηκεύτηκε σε:
Λεπτομέρειες βιβλιογραφικής εγγραφής
Τόπος έκδοσης:Cryst Growth Des
Κύριοι συγγραφείς: Barzaghi, Andrea, Firoozabadi, Saleh, Salvalaglio, Marco, Bergamaschini, Roberto, Ballabio, Andrea, Beyer, Andreas, Albani, Marco, Valente, Joao, Voigt, Axel, Paul, Douglas J., Miglio, Leo, Montalenti, Francesco, Volz, Kerstin, Isella, Giovanni
Μορφή: Artigo
Γλώσσα:Inglês
Έκδοση: American Chemical Society 2020
Διαθέσιμο Online:https://ncbi.nlm.nih.gov/pmc/articles/PMC8016367/
https://ncbi.nlm.nih.gov/pubmed/33828439
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.cgd.9b01312
Ετικέτες: Προσθήκη ετικέτας
Δεν υπάρχουν, Καταχωρήστε ετικέτα πρώτοι!

Παρόμοια τεκμήρια