Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

[Image: see text] We present an experimental and theoretical analysis of the formation of nanovoids within Si microcrystals epitaxially grown on Si patterned substrates. The growth conditions leading to the nucleation of nanovoids have been highlighted, and the roles played by the deposition rate, s...

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Detaylı Bibliyografya
Yayımlandı:Cryst Growth Des
Asıl Yazarlar: Barzaghi, Andrea, Firoozabadi, Saleh, Salvalaglio, Marco, Bergamaschini, Roberto, Ballabio, Andrea, Beyer, Andreas, Albani, Marco, Valente, Joao, Voigt, Axel, Paul, Douglas J., Miglio, Leo, Montalenti, Francesco, Volz, Kerstin, Isella, Giovanni
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: American Chemical Society 2020
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC8016367/
https://ncbi.nlm.nih.gov/pubmed/33828439
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.cgd.9b01312
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