Self-Assembly of Nanovoids in Si Microcrystals Epitaxially Grown on Deeply Patterned Substrates

[Image: see text] We present an experimental and theoretical analysis of the formation of nanovoids within Si microcrystals epitaxially grown on Si patterned substrates. The growth conditions leading to the nucleation of nanovoids have been highlighted, and the roles played by the deposition rate, s...

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Detalhes bibliográficos
Publicado no:Cryst Growth Des
Main Authors: Barzaghi, Andrea, Firoozabadi, Saleh, Salvalaglio, Marco, Bergamaschini, Roberto, Ballabio, Andrea, Beyer, Andreas, Albani, Marco, Valente, Joao, Voigt, Axel, Paul, Douglas J., Miglio, Leo, Montalenti, Francesco, Volz, Kerstin, Isella, Giovanni
Formato: Artigo
Idioma:Inglês
Publicado em: American Chemical Society 2020
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC8016367/
https://ncbi.nlm.nih.gov/pubmed/33828439
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.cgd.9b01312
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