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A Fast-Switching (1.35-μs) Low-Control-Voltage (2.5-V) MEMS T/R Switch Monolithically Integrated With a Capacitive Micromachined Ultrasonic Transducer (CMUT)
This paper describes the design and fabrication of an electrostatic MEMS switch that can be co-fabricated on the same substrate with a capacitive micromachined ultrasonic transducer (CMUT) as a transmit/receive (T/R) switch. The structure of the switch is modified from a single CMUT cell. An interru...
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| Vydáno v: | J Microelectromech Syst |
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| Hlavní autoři: | , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2018
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7978394/ https://ncbi.nlm.nih.gov/pubmed/33746472 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2017.2781255 |
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