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Backward-Mode Photoacoustic Imaging Using Illumination Through a CMUT With Improved Transparency
In this paper, we describe a capacitive micromachined ultrasonic transducer (CMUT) with improved transparency for photoacoustic imaging (PAI) with backside illumination. The CMUT was fabricated on a glass substrate with indium tin oxide (ITO) bottom electrodes. The plate was a 1.5-μm silicon layer f...
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| Publicado no: | IEEE Trans Ultrason Ferroelectr Freq Control |
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| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5763917/ https://ncbi.nlm.nih.gov/pubmed/29283350 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2017.2774283 |
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