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Wear comparison of critical dimension-atomic force microscopy tips
Nanoscale wear affects the performance of atomic force microscopy (AFM)-based measurements for all applications including process control measurements and nanoelectronics characterization. As such, methods to prevent or reduce AFM tip wear is an area of active research. However, most prior work has...
Gorde:
| Argitaratua izan da: | J Micro Nanolithogr MEMS MOEMS |
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| Egile Nagusiak: | , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
2020
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7724968/ https://ncbi.nlm.nih.gov/pubmed/33304445 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.jmm.19.1.014004 |
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