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Lateral Tip Control Effects in CD-AFM Metrology: The Large Tip Limit
Sidewall sensing in critical dimension atomic force microscopes (CD-AFMs) usually involves continuous lateral dithering of the tip or the use of a control algorithm and fast response piezo actuator to position the tip in a manner that resembles touch-triggering of coordinate measuring machine (CMM)...
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| Publicat a: | J Micro Nanolithogr MEMS MOEMS |
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| Autors principals: | , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2016
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4832421/ https://ncbi.nlm.nih.gov/pubmed/27087883 |
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