A carregar...
Tip Characterization Method using Multi-feature Characterizer for CD-AFM
In atomic force microscopy (AFM) metrology, the tip is a key source of uncertainty. Images taken with an AFM show a change in feature width and shape that depends on tip geometry. This geometric dilation is more pronounced when measuring features with high aspect ratios, and makes it difficult to ob...
Na minha lista:
| Publicado no: | Ultramicroscopy |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2015
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4803071/ https://ncbi.nlm.nih.gov/pubmed/26720439 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultramic.2015.12.003 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|