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Conductive AFM for CNT characterization
We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-depe...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3564687/ https://ncbi.nlm.nih.gov/pubmed/23311434 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-24 |
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