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Wear comparison of critical dimension-atomic force microscopy tips

Nanoscale wear affects the performance of atomic force microscopy (AFM)-based measurements for all applications including process control measurements and nanoelectronics characterization. As such, methods to prevent or reduce AFM tip wear is an area of active research. However, most prior work has...

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Detalhes bibliográficos
Publicado no:J Micro Nanolithogr MEMS MOEMS
Main Authors: Orji, Ndubuisi G., Dixson, Ronald G., Lopez, Ernesto, Irmer, Bernd
Formato: Artigo
Idioma:Inglês
Publicado em: 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7724968/
https://ncbi.nlm.nih.gov/pubmed/33304445
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.jmm.19.1.014004
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