Evaluation of carbon nanotube probes in critical dimension atomic force microscopes

The decreasing size of semiconductor features and the increasing structural complexity of advanced devices have placed continuously greater demands on manufacturing metrology, arising both from the measurement challenges of smaller feature sizes and the growing requirement to characterize structures...

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Vydáno v:J Micro Nanolithogr MEMS MOEMS
Hlavní autoři: Choi, Jinho, Park, Byong Chon, Ahn, Sang Jung, Kim, Dal-Hyun, Lyou, Joon, Dixson, Ronald G., Orji, Ndubuisi G., Fu, Joseph, Vorburger, Theodore V.
Médium: Artigo
Jazyk:Inglês
Vydáno: 2016
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On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC5103326/
https://ncbi.nlm.nih.gov/pubmed/27840664
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.JMM.15.3.034005
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