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Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures
Optimizing the extraction of information from x-ray measurements while minimizing exposure time is an important area of research in a variety of fields. The semiconductor industry is reaching a point where the traditional optical metrologies need to be augmented in order to better resolve the critic...
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| Publicat a: | J Micro Nanolithogr MEMS MOEMS |
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| Autors principals: | , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7539628/ https://ncbi.nlm.nih.gov/pubmed/33033553 |
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