Yüklüyor......
Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures
Optimizing the extraction of information from x-ray measurements while minimizing exposure time is an important area of research in a variety of fields. The semiconductor industry is reaching a point where the traditional optical metrologies need to be augmented in order to better resolve the critic...
Kaydedildi:
| Yayımlandı: | J Micro Nanolithogr MEMS MOEMS |
|---|---|
| Asıl Yazarlar: | , |
| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
2018
|
| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7539628/ https://ncbi.nlm.nih.gov/pubmed/33033553 |
| Etiketler: |
Etiketle
Etiket eklenmemiş, İlk siz ekleyin!
|