Lataa...
Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures
Optimizing the extraction of information from x-ray measurements while minimizing exposure time is an important area of research in a variety of fields. The semiconductor industry is reaching a point where the traditional optical metrologies need to be augmented in order to better resolve the critic...
Tallennettuna:
| Julkaisussa: | J Micro Nanolithogr MEMS MOEMS |
|---|---|
| Päätekijät: | , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
2018
|
| Aiheet: | |
| Linkit: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7539628/ https://ncbi.nlm.nih.gov/pubmed/33033553 |
| Tagit: |
Lisää tagi
Ei tageja, Lisää ensimmäinen tagi!
|