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Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures
Optimizing the extraction of information from x-ray measurements while minimizing exposure time is an important area of research in a variety of fields. The semiconductor industry is reaching a point where the traditional optical metrologies need to be augmented in order to better resolve the critic...
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| Publicado no: | J Micro Nanolithogr MEMS MOEMS |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7539628/ https://ncbi.nlm.nih.gov/pubmed/33033553 |
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