Llwytho...
Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures
Optimizing the extraction of information from x-ray measurements while minimizing exposure time is an important area of research in a variety of fields. The semiconductor industry is reaching a point where the traditional optical metrologies need to be augmented in order to better resolve the critic...
Wedi'i Gadw mewn:
| Cyhoeddwyd yn: | J Micro Nanolithogr MEMS MOEMS |
|---|---|
| Prif Awduron: | , |
| Fformat: | Artigo |
| Iaith: | Inglês |
| Cyhoeddwyd: |
2018
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| Pynciau: | |
| Mynediad Ar-lein: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7539628/ https://ncbi.nlm.nih.gov/pubmed/33033553 |
| Tagiau: |
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