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Structural Property Study for GeSn Thin Films

The structural properties of GeSn thin films with different Sn concentrations and thicknesses grown on Ge (001) by molecular beam epitaxy (MBE) and on Ge-buffered Si (001) wafers by chemical vapor deposition (CVD) were analyzed through high resolution X-ray diffraction and cross-sectional transmissi...

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Bibliografische gegevens
Gepubliceerd in:Materials (Basel)
Hoofdauteurs: Zhang, Liyao, Song, Yuxin, von den Driesch, Nils, Zhang, Zhenpu, Buca, Dan, Grützmacher, Detlev, Wang, Shumin
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2020
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC7476050/
https://ncbi.nlm.nih.gov/pubmed/32824570
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13163645
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