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Structural Property Study for GeSn Thin Films

The structural properties of GeSn thin films with different Sn concentrations and thicknesses grown on Ge (001) by molecular beam epitaxy (MBE) and on Ge-buffered Si (001) wafers by chemical vapor deposition (CVD) were analyzed through high resolution X-ray diffraction and cross-sectional transmissi...

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書誌詳細
出版年:Materials (Basel)
主要な著者: Zhang, Liyao, Song, Yuxin, von den Driesch, Nils, Zhang, Zhenpu, Buca, Dan, Grützmacher, Detlev, Wang, Shumin
フォーマット: Artigo
言語:Inglês
出版事項: MDPI 2020
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC7476050/
https://ncbi.nlm.nih.gov/pubmed/32824570
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13163645
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