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An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications
Despite the development of energy-efficient devices in various applications, microelectromechanical system (MEMS) electrostatic actuators yet require high voltages to generate large displacements. In this respect, electrets exhibiting quasi-permanent electrical charges allow large fixed voltages to...
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| Published in: | Micromachines (Basel) |
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| Main Authors: | , , , |
| Format: | Artigo |
| Language: | Inglês |
| Published: |
MDPI
2020
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7143079/ https://ncbi.nlm.nih.gov/pubmed/32143465 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030267 |
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