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Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator
We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experim...
Gorde:
| Argitaratua izan da: | Sensors (Basel) |
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| Egile Nagusiak: | , , , , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI
2017
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5470797/ https://ncbi.nlm.nih.gov/pubmed/28505097 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17051121 |
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