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Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices
Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity...
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| Главные авторы: | , , |
|---|---|
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
MDPI AG
2007-05-01
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| Серии: | Sensors |
| Предметы: | |
| Online-ссылка: | http://www.mdpi.com/1424-8220/7/5/760/ |
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