Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Di Chen, Guang Meng, Wen-Ming Zhang
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2007-05-01
Schriftenreihe:Sensors
Schlagworte:
MEMS
Electrostatic force
Scaling effect
Stability
Nonlinearity
Reliability.
Online Zugang:http://www.mdpi.com/1424-8220/7/5/760/
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!

Ähnliche Einträge