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MEMS Electrostatic Actuation in Conducting Biological Media
We present design and experimental implementation of electrostatic comb-drive actuators in solutions of high conductivity relevant for biological cells. The actuators are operated in the frequency range 1–10 MHz in ionic and biological cell culture media, with ionic strengths up to 150 mMoles/L. Typ...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2746652/ https://ncbi.nlm.nih.gov/pubmed/20161046 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2009.2013398 |
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