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Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experim...

Disgrifiad llawn

Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Sensors (Basel)
Prif Awduron: Al-Ghamdi, Majed S., Alneamy, Ayman M., Park, Sangtak, Li, Beichen, Khater, Mahmoud E., Abdel-Rahman, Eihab M., Heppler, Glenn R., Yavuz, Mustafa
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: MDPI 2017
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC5470797/
https://ncbi.nlm.nih.gov/pubmed/28505097
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s17051121
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