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A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing for mass production. Among the different test methods, frequency domain analysis is one of the easiest and fastest. This paper presents the measurement uncertainties in electrostatically actuated MEMS...
Guardat en:
| Publicat a: | Micromachines (Basel) |
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| Autors principals: | , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2018
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187468/ https://ncbi.nlm.nih.gov/pubmed/30424106 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9040173 |
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