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A Study on Measurement Variations in Resonant Characteristics of Electrostatically Actuated MEMS Resonators
Microelectromechanical systems (MEMS) resonators require fast, accurate, and cost-effective testing for mass production. Among the different test methods, frequency domain analysis is one of the easiest and fastest. This paper presents the measurement uncertainties in electrostatically actuated MEMS...
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| Publicado no: | Micromachines (Basel) |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6187468/ https://ncbi.nlm.nih.gov/pubmed/30424106 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9040173 |
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