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An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications

Despite the development of energy-efficient devices in various applications, microelectromechanical system (MEMS) electrostatic actuators yet require high voltages to generate large displacements. In this respect, electrets exhibiting quasi-permanent electrical charges allow large fixed voltages to...

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Detalhes bibliográficos
Publicado no:Micromachines (Basel)
Main Authors: Sano, Chikako, Ataka, Manabu, Hashiguchi, Gen, Toshiyoshi, Hiroshi
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2020
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC7143079/
https://ncbi.nlm.nih.gov/pubmed/32143465
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11030267
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