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An a posteriori Error Estimate for Scanning Electron Microscope Simulation with Adaptive Mesh Refinement

The intensity variation in a scanning electron microscope is a complex function of sample topography and composition. Measurement accuracy is improved when an explicit accounting for the relationship between signal and measurand is made. Because the determinants of the signal are many, the theoretic...

Täydet tiedot

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Bibliografiset tiedot
Julkaisussa:J Sci Comput
Päätekijät: Mitchell, William F., Villarrubia, John S.
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: 2019
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC7067220/
https://ncbi.nlm.nih.gov/pubmed/32165785
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10915-019-00995-2
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