Cargando...

An a posteriori Error Estimate for Scanning Electron Microscope Simulation with Adaptive Mesh Refinement

The intensity variation in a scanning electron microscope is a complex function of sample topography and composition. Measurement accuracy is improved when an explicit accounting for the relationship between signal and measurand is made. Because the determinants of the signal are many, the theoretic...

Descripción completa

Guardado en:
Detalles Bibliográficos
Publicado en:J Sci Comput
Autores principales: Mitchell, William F., Villarrubia, John S.
Formato: Artigo
Lenguaje:Inglês
Publicado: 2019
Materias:
Acceso en línea:https://ncbi.nlm.nih.gov/pmc/articles/PMC7067220/
https://ncbi.nlm.nih.gov/pubmed/32165785
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s10915-019-00995-2
Etiquetas: Agregar Etiqueta
Sin Etiquetas, Sea el primero en etiquetar este registro!